Axcelis Technologies Inc

BANK OF MONTREAL /CAN/ ACLS

Report date

3/31/2014

Quarter

2014 Q1

Filed

5/15/2014

Shares

80,000

Value ($000)

172

Weight

0.0%

2013 Q3 - 2014 Q1 (3 filings)

Shares History

History scope: non-option holdings only (PUT/CALL rows excluded).

All 13F Holders	Filing date	Value ($000s)	% of Holdings	Shares	Reporting period
2014 Q1	5/15/2014	172	0.0%	80,000	3/31/2014
2013 Q4	1/8/2014	46	0.0%	18,900	12/31/2013
2013 Q3	1/8/2014	3	0.0%	1,200	9/30/2013