Onto Innovation Inc.

Universal- Beteiligungs- und Servicegesellschaft mbH ONTO

Report date

12/31/2025

Quarter

2025 Q4

Filed

1/28/2026

Shares

75,898

Value ($000)

11,992

Weight

0.0%

2025 Q1 - 2025 Q4 (4 filings)

Shares History

History scope: non-option holdings only (PUT/CALL rows excluded).

All 13F Holders	Filing date	Value ($000s)	% of Holdings	Shares	Reporting period
2025 Q4	1/28/2026	11,992	0.0%	75,898	12/31/2025
2025 Q3	10/30/2025	6,613	0.0%	51,176	9/30/2025
2025 Q2	8/11/2025	3,781	0.0%	37,462	6/30/2025
2025 Q1	5/6/2025	2,815	0.0%	23,198	3/31/2025